Title:
FILM SUPPORTING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2006/003779
Kind Code:
A1
Abstract:
A film supporting apparatus which can improve film planarity and film processing accuracy is provided. A film supporting apparatus (150) is provided with a clamp part (152) for supporting a side (102) to expose both front and rear planes of a film (101); a clamp part (153) for supporting a side (103) to expose the both front and rear planes of the film (101); a linearly moving part (161) for movably supporting the clamp part (153) in an X direction (106); a linearly moving part (162) for movably supporting the clamp part (153) in a Y direction (107); a turning parts (163, 164) for turnably supporting the clamp parts (152, 153) in a Θ direction (108); and an urging part (171) for urging the clamp part (153) in a receding direction from the clamp part (152).
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Inventors:
YAMADA HIDEO (JP)
ISHIDA TAKESHI (JP)
ICHIKAWA TSUTOMU (JP)
ISHIDA TAKESHI (JP)
ICHIKAWA TSUTOMU (JP)
Application Number:
PCT/JP2005/010502
Publication Date:
January 12, 2006
Filing Date:
June 08, 2005
Export Citation:
Assignee:
PIONEER CORP (JP)
YAMADA HIDEO (JP)
ISHIDA TAKESHI (JP)
ICHIKAWA TSUTOMU (JP)
YAMADA HIDEO (JP)
ISHIDA TAKESHI (JP)
ICHIKAWA TSUTOMU (JP)
International Classes:
C23C14/20; C23C14/24; H05B33/10; H05B33/14; (IPC1-7): C23C14/20; C23C14/24; H05B33/10; H05B33/14
Foreign References:
| JP2003100727A | 2003-04-04 | |||
| JPS5032954A | 1975-03-29 |
Attorney, Agent or Firm:
Ishikawa, Yasuo (17-11 Shiba 2-chom, Minato-ku ., JP)
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