PIEZOELECTRIC/ELECTROSTRICTIVE FILM TYPE CHIP

Title:

PIEZOELECTRIC/ELECTROSTRICTIVE FILM TYPE CHIP

Document Type and Number:

WIPO Patent Application WO/1997/003836

Kind Code:

A1

Abstract:

A piezoelectric/electrostrictive film type chip (50) comprises a spacer plate (74) having a window arrangement pattern (100) composed of at least a plurality of windows (75), a ceramic substrate (70) integrated with a thin closure plate (72) covering the windows (75), and a piezoelectric/electrostrictive actuating section (71) composed of a lower electrode (81), a piezoelectric/electrostrictive layer (82) and an upper electrode (83) which are successively formed in multilayer by a film-forming method in the area covering the windows (75) on the outer surface of the closure plate (72). A positioning pin hole (52) is provided at or near the center of gravity of the window arrangement pattern (100). The lowering of the accuracy of the alignment of the pin pressure with the communication hole of the piezoelectric/electrostrictive actuator is suppressed to a minimum, and therefore the chip is joined to the ink-nozzle member with good positional accuracy.

Inventors:

USUI MINORU (JP)
KATAKURA TAKAHIRO (JP)
AKAHANE FUJIO (JP)
KAMOI KAZUMI (JP)
SHINADA SATOSHI (JP)
TAKEUCHI YUKIHISA (JP)
TAKAHASHI NOBUO (JP)

Application Number:

PCT/JP1996/002054

Publication Date:

February 06, 1997

Filing Date:

July 23, 1996

Export Citation:

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Assignee:

SEIKO EPSON CORP (JP)
NGK INSULATORS LTD (JP)
USUI MINORU (JP)
KATAKURA TAKAHIRO (JP)
AKAHANE FUJIO (JP)
KAMOI KAZUMI (JP)
SHINADA SATOSHI (JP)
TAKEUCHI YUKIHISA (JP)
TAKAHASHI NOBUO (JP)

International Classes:

B41J2/045; B41J2/14; B41J2/16; (IPC1-7): B41J2/045

Foreign References:

JPH0345812Y2	1991-09-27
JPS63256453A	1988-10-24
JPH06336012A	1994-12-06

Other References: