FILTERS EMPLOYING BOTH ACIDIC POLYMERS AND PHYSICAL-ABSORPTION MEDIA

Title:

FILTERS EMPLOYING BOTH ACIDIC POLYMERS AND PHYSICAL-ABSORPTION MEDIA

Document Type and Number:

WIPO Patent Application WO2001085308

Kind Code:

A3

Abstract:

A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to absorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

Inventors:

KISHKOVICH OLEG P (US)
KINKEAD DEVON (US)
GRAYFER ANATOLY (US)
GOODWIN WILLIAM M (US)
RUEDE DAVID (US)

Application Number:

PCT/US2001/014655

Publication Date:

September 12, 2003

Filing Date:

May 04, 2001

Export Citation:

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Assignee:

EXTRACTION SYSTEMS INC (US)
KISHKOVICH OLEG P (US)
KINKEAD DEVON (US)
GRAYFER ANATOLY (US)
GOODWIN WILLIAM M (US)
RUEDE DAVID (US)

International Classes:

B01D53/04; B01D53/06; B01J20/26; (IPC1-7): B01D53/04; G03F7/00

Domestic Patent References:

WO2000025896A1

2000-05-11

Foreign References:

US5944878A	1999-08-31
EP0335034A1	1989-10-04
EP0398847A2	1990-11-22
EP0584030A1	1994-02-23
US4852133A	1989-07-25
US4629479A	1986-12-16
DE19859788C1	2000-03-23

Other References: