Title:
FLUID CONTROLLER
Document Type and Number:
WIPO Patent Application WO/2010/100792
Kind Code:
A1
Abstract:
Provided is a fluid controller which has a reduced cost and requires a reduced space. A fluid controller (1) has a fluid control section (2) and a fluid introducing section (3). The fluid introducing section (3) is separated into three sections, and is composed of first and second shutting/opening sections (5, 6) on the inlet side, each of which is arranged on the inlet side and is composed of 2×N/2 number of open/close valves (23), and a shutting/opening section (7) on the fluid control section side, which is composed of 4×M number of open/close valves (23) and is arranged between the first and second shutting/opening sections (5, 6) on the inlet side and the fluid control section (2).
Inventors:
HIROSE JUN (JP)
TEZUKA KAZUYUKI (JP)
UCHIDA YOHEI (JP)
KOYOMOGI MUTSUNORI (JP)
MATSUDA TAKAHIRO (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
TEZUKA KAZUYUKI (JP)
UCHIDA YOHEI (JP)
KOYOMOGI MUTSUNORI (JP)
MATSUDA TAKAHIRO (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
Application Number:
PCT/JP2009/068982
Publication Date:
September 10, 2010
Filing Date:
November 06, 2009
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
FUJIKIN KK (JP)
HIROSE JUN (JP)
TEZUKA KAZUYUKI (JP)
UCHIDA YOHEI (JP)
KOYOMOGI MUTSUNORI (JP)
MATSUDA TAKAHIRO (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
FUJIKIN KK (JP)
HIROSE JUN (JP)
TEZUKA KAZUYUKI (JP)
UCHIDA YOHEI (JP)
KOYOMOGI MUTSUNORI (JP)
MATSUDA TAKAHIRO (JP)
DOHI RYOUSUKE (JP)
NISHINO KOUJI (JP)
IKEDA NOBUKAZU (JP)
International Classes:
G05D7/06; C23C16/52; H01L21/205
Foreign References:
| JP2003091322A | 2003-03-28 | |||
| JPH1066922A | 1998-03-10 | |||
| JPH06119059A | 1994-04-28 |
Attorney, Agent or Firm:
HIBI, Norihiko et al. (JP)
Norihiko Hibi (JP)
Norihiko Hibi (JP)
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