Title:
FLUID CONTROLLER
Document Type and Number:
WIPO Patent Application WO/2016/136427
Kind Code:
A1
Abstract:
Provided is a fluid controller for which increases in costs due to additional parts and additional processing for a setting means are suppressed and the problem of set values for upward movement of a stem varying is solved. The top face of the outer circumferential edge of a diaphragm holder (7) and the bottom face of the inner circumferential edge of an adapter (15) are formed to be facing across a first gap (A). The amount of upward movement of the diaphragm holder (7) is set by setting the first gap (A) to a prescribed value.
Inventors:
TOKUDA ICHIRO (JP)
HARADA AKIHIRO (JP)
KISO HIDENORI (JP)
NAKATA TOMOHIRO (JP)
SHINOHARA TSUTOMU (JP)
YAMAJI MICHIO (JP)
HARADA AKIHIRO (JP)
KISO HIDENORI (JP)
NAKATA TOMOHIRO (JP)
SHINOHARA TSUTOMU (JP)
YAMAJI MICHIO (JP)
Application Number:
PCT/JP2016/053478
Publication Date:
September 01, 2016
Filing Date:
February 05, 2016
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
F16K7/17; F16K31/122
Foreign References:
JPH0379875A | 1991-04-04 | |||
JP2007064333A | 2007-03-15 | |||
JP2001021052A | 2001-01-26 |
Attorney, Agent or Firm:
WATANABE, Akira et al. (JP)
Akira Watanabe (JP)
Akira Watanabe (JP)
Download PDF:
Previous Patent: CURRENT CONTROL DEVICE AND POWER SUPPLY SYSTEM
Next Patent: CARBON NANOTUBE DISPERSION AND METHOD FOR MANUFACTURING CONDUCTIVE FILM
Next Patent: CARBON NANOTUBE DISPERSION AND METHOD FOR MANUFACTURING CONDUCTIVE FILM