Title:
FLUOROALKANESULFONIC ACID AMMONIUM SALTS AND METHOD FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2010/104177
Kind Code:
A1
Abstract:
A fluoroalkanesulfinic acid ammonium salt is obtained using an organic base when a bromofluoroalkyl carboxylate ester is sulfinated using a sulfinating agent. The fluoroalkanesulfinic acid ammonium salt is oxidized, thereby obtaining a fluoroalkanesulfonic acid ammonium salt. The fluoroalkanesulfonic acid ammonium salt is used as a starting material and exchanged into an onium salt directly or through saponification or esterification, thereby obtaining a fluoroalkanesulfonic acid onium salt. The fluoroalkanesulfonic acid onium salt is useful as a photo-acid generating agent to be used for a chemically amplified resist material.
Inventors:
NAGAMORI MASASHI
HAGIWARA YUJI
MASUBUCHI TAKASHI
NARIZUKA SATORU
HAGIWARA YUJI
MASUBUCHI TAKASHI
NARIZUKA SATORU
Application Number:
PCT/JP2010/054245
Publication Date:
September 16, 2010
Filing Date:
March 12, 2010
Export Citation:
Assignee:
CENTRAL GLASS CO LTD (JP)
NAGAMORI MASASHI
HAGIWARA YUJI
MASUBUCHI TAKASHI
NARIZUKA SATORU
NAGAMORI MASASHI
HAGIWARA YUJI
MASUBUCHI TAKASHI
NARIZUKA SATORU
International Classes:
C07C313/04; C07C303/02; C07C303/32; C07C309/12; C07C381/12; G03F7/004
Domestic Patent References:
| WO2009037980A1 | 2009-03-26 | |||
| WO2009037981A1 | 2009-03-26 | |||
| WO2008099869A1 | 2008-08-21 |
Attorney, Agent or Firm:
HASHIMOTO, Takeshi et al. (JP)
Hashimoto 剛 (JP)
Hashimoto 剛 (JP)
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