Title:
FOCUSING DEVICE, MICROSCOPE DEVICE, FOCUSING METHOD, AND CONTROL PROGRAM
Document Type and Number:
WIPO Patent Application WO/2015/181951
Kind Code:
A1
Abstract:
[Problem] To adjust a focal position in a shorter time when observing the inside of an observation sample.
[Solution] A focusing device comprises: an interface detector (30) for detecting the position of an interface (3a) located at a container (3) for containing an observation object (2); and a controller (71) which performs focal position maintaining control for keeping a focal position (F) of an objective lens (21) at a reference position placed at a fixed distance (offset value (OS)) from the interface (3a) detected by the interface detector (30) in an optical axis direction (O1), and shifts the focal position (F) from the reference position at the imaging timing for the imaging unit (60) by referring to the reference position and moving at least either the objective lens (21) or the observation object (2) in the optical axis direction (O1) .
Inventors:
NAKANO YOSHITARO (JP)
OKAMOTO TAKAAKI (JP)
OKAMOTO TAKAAKI (JP)
Application Number:
PCT/JP2014/064424
Publication Date:
December 03, 2015
Filing Date:
May 30, 2014
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B7/28; G02B21/26; G02B7/36
Foreign References:
| JP2013020172A | 2013-01-31 | |||
| JP2007148221A | 2007-06-14 | |||
| JP2004070276A | 2004-03-04 | |||
| JP2005128493A | 2005-05-19 | |||
| JP2001091821A | 2001-04-06 | |||
| JP2008122857A | 2008-05-29 |
Other References:
See also references of EP 3151053A4
Attorney, Agent or Firm:
NISHI, Kazuya et al. (JP)
West Kazuya (JP)
West Kazuya (JP)
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