Title:
FOURIER SPECTROPHOTOMETER
Document Type and Number:
WIPO Patent Application WO/2021/085442
Kind Code:
A1
Abstract:
A Fourier spectrophotometer comprising: a light source; an interferometer that obtains, from light emitted from the light source, first and second interferograms having mutually reversed intensity distributions; a multiplexing optical system that multiplexes and irradiates the first and second interferograms onto a sample; a demultiplexing optical system that demultiplexes the first and second interferograms included in the light that has passed through the sample; a light reception unit that outputs a first light reception signal obtained by receiving the demultiplexed first interferogram and a second light reception signal obtained by receiving the demultiplexed second interferogram; and a signal processing device that uses the first and second light reception signals and finds a noise-removed spectrum for a wavelength component for an analysis wavelength band.
Inventors:
SUZUKI YASUYUKI (JP)
NAKAMURA YUKIHIRO (JP)
NAMATAME TETSUSHI (JP)
NAKAMURA YUKIHIRO (JP)
NAMATAME TETSUSHI (JP)
Application Number:
PCT/JP2020/040328
Publication Date:
May 06, 2021
Filing Date:
October 27, 2020
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP (JP)
International Classes:
G01J3/45; G01N21/27
Domestic Patent References:
WO2017017859A1 | 2017-02-02 | |||
WO2001056472A1 | 2001-08-09 |
Foreign References:
JPH06504845A | 1994-06-02 | |||
JP2015194359A | 2015-11-05 | |||
JPH03220430A | 1991-09-27 | |||
JPH02268234A | 1990-11-01 | |||
JPS63167227A | 1988-07-11 | |||
JP2019196080A | 2019-11-14 | |||
JP2019052994A | 2019-04-04 |
Other References:
See also references of EP 4053522A4
Attorney, Agent or Firm:
TANAI Sumio et al. (JP)
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