Title:
FULL-BAND MEMS MICROPHONE HAVING SOUND BEAMS AND SOUND TUNNELS
Document Type and Number:
WIPO Patent Application WO/2022/036961
Kind Code:
A1
Abstract:
A full-band MEMS microphone having sound beams and sound tunnels, the microphone comprising a sensor, a sound cavity and a circuit board. The sensor comprises a vibrating diaphragm and a silicon back pole plate, a sound beam assembly is arranged on the vibrating diaphragm and comprises a plurality of arc-shaped sound beam members, the arc-shaped sound beam members are arranged in a ring shape, and a gap is provided between every two adjacent arc-shaped sound beam members; an annular area and at least two radiation grooves are provided in a surface of the vibrating diaphragm that is provided with the sound beam assembly; the radiation grooves are radially and uniformly distributed and equally divide the surface of the vibrating diaphragm on an outer side of the sound beam assembly into a plurality of resonance areas; and the radiation grooves and the gaps between the two arc-shaped sound beam members are arranged in a one-to-one alignment and in a penetrating manner, inner ends of the radiation grooves are all in communication with the annular area, and the radiation grooves are concavely arranged on the surface of the vibrating diaphragm to form the sound tunnels. By means of changing the vibrating diaphragm from a conventional free vibrating mode to a present standard vibrating mode, the problem of an MEMS microphone not being able to effectively resonate full-band sound details is solved from the aspects of vibration and resonance, and the provided MEMS microphone can effectively resonate in the full band to achieve a high-fidelity effect.
Inventors:
JIN HAIOU (CN)
WU NIANBO (CN)
HE XINXI (CN)
ZHU XINZHI (CN)
LI BIYING (CN)
YANG PING (CN)
WU NIANBO (CN)
HE XINXI (CN)
ZHU XINZHI (CN)
LI BIYING (CN)
YANG PING (CN)
Application Number:
PCT/CN2020/136855
Publication Date:
February 24, 2022
Filing Date:
December 16, 2020
Export Citation:
Assignee:
SUZHOU LI YUE MUSICAL INSTR CO LTD (CN)
International Classes:
H04R19/04; H04R7/12
Foreign References:
| CN111954138A | 2020-11-17 | |||
| CN101841756A | 2010-09-22 | |||
| CN101883305A | 2010-11-10 | |||
| CN104602173A | 2015-05-06 | |||
| CN108419193A | 2018-08-17 | |||
| CN106303868A | 2017-01-04 | |||
| CN108650596A | 2018-10-12 | |||
| US20100166235A1 | 2010-07-01 | |||
| US20160304337A1 | 2016-10-20 |
Attorney, Agent or Firm:
SUZHOU CREATOR PATENT AND TRADEMARK AGENCY, LTD. (CN)
Download PDF: