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Title:
FULLY DECOUPLED THREE-AXIS MEMS GYROSCOPE
Document Type and Number:
WIPO Patent Application WO/2024/011679
Kind Code:
A1
Abstract:
A fully decoupled MEMS gyroscope, comprising a substrate (1), a sensing unit (2) elastically connected to the substrate (1), and a driving unit (3) coupled to the sensing unit (2) and used for driving the sensing unit (2) to move. The substrate (1) comprises a coupling anchor point (11) located at the center of a rectangle and a coupling structure (12) elastically connected to the coupling anchor point (11); the driving unit (3) comprises four driving members (31) respectively located inside four corners of the rectangle; the sensing unit (2) comprises two X mass blocks (21) symmetrically arranged in two receiving intervals, two Y mass blocks (22) symmetrically arranged in the other two receiving intervals, four Z mass blocks (23) respectively and elastically connected to adjacent driving members (31) and located at the four corners of the rectangle, and four Z detection decoupling members (4) respectively and elastically connected to adjacent Z mass blocks (23) and respectively and elastically connected around the rectangle. The fully decoupled MEMS gyroscope is differentially driven, such that differential detection can be achieved, and orthogonal errors can be reduced.

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Inventors:
MA ZHAO (CN)
ZHAN ZHAN (CN)
YANG SHAN (CN)
KAN XIAO (CN)
YAN SHITAO (CN)
PENG HONGTAO (CN)
LI YANG (CN)
LAI KAHKEEN (CN)
TAN QIUYU (CN)
Application Number:
PCT/CN2022/110022
Publication Date:
January 18, 2024
Filing Date:
August 03, 2022
Export Citation:
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Assignee:
AAC KAITAI TECH WUHAN CO LTD (CN)
International Classes:
G01C19/5656
Foreign References:
CN114719834A2022-07-08
CN102365523A2012-02-29
CN114719833A2022-07-08
CN101839718A2010-09-22
CN102116622A2011-07-06
CN102334010A2012-01-25
US20100126272A12010-05-27
Attorney, Agent or Firm:
HENSEN INTELLECTUAL PROPERTY FIRM (CN)
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