Title:
MAGNETIC CONTROL ASSEMBLY, PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD, AND CONTROL APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/011678
Kind Code:
A1
Abstract:
The present disclosure relates to a magnetic control assembly, a physical vapor deposition apparatus and method, and a control apparatus. The magnetic control assembly (310) is connected to a back plate (321) of a reaction chamber (320), and the magnetic control assembly (310) comprises an electric control device (311) and electromagnets (312). A plurality of electromagnets (312) are provided, the plurality of electromagnets (312) are all electrically connected to the electric control device (311) and are arranged on the back plate (321), and the electric control device (311) is used for controlling power-on and power-off of each electromagnet (312) and adjusting the magnitude of current of each electromagnet (312). According to the magnetic control assembly, the physical vapor deposition apparatus and method, and the control apparatus, conformality can be improved, high adaptability is achieved, and water leakage can be avoided, thereby improving product performance.
Inventors:
WANG FENGFENG (CN)
Application Number:
PCT/CN2022/109987
Publication Date:
January 18, 2024
Filing Date:
August 03, 2022
Export Citation:
Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
C23C14/46; C23C14/34; C23C14/54
Foreign References:
| CN109750265A | 2019-05-14 | |||
| TW201535467A | 2015-09-16 | |||
| JP2005232554A | 2005-09-02 | |||
| CN109423616A | 2019-03-05 | |||
| CN107785219A | 2018-03-09 | |||
| CN110904414A | 2020-03-24 | |||
| CN208234983U | 2018-12-14 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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