Title:
GAS FEED DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/131615
Kind Code:
A1
Abstract:
A gas feed device (60) is provided with a material container (Zn), a dilution container (Xn), and a valve part (Yn). The material container (Zn) houses a material gas (Gn). The dilution container (Xn) mixes the material gas (Gn) introduced from the material container (Zn) with a carrier gas (CG) for diluting the material gas (Gn), and houses the mixed gas as a diluted material gas (Dn). The valve part (Yn) introduces the material gas (Gn) and the carrier gas (CG) into the dilution container (Xn) at mutually different timings. After the material gas (Gn) is mixed with the carrier gas (CG), the valve part (Yn) discharges the diluted material gas (Dn) from the dilution container (Xn).
Inventors:
TAKEMOTO KIKUROU (JP)
ISHIKAWA KOICHI (JP)
MIHIRA HIROSHI (JP)
ISHIKAWA KOICHI (JP)
MIHIRA HIROSHI (JP)
Application Number:
PCT/JP2018/047528
Publication Date:
July 04, 2019
Filing Date:
December 25, 2018
Export Citation:
Assignee:
ACE INC (JP)
International Classes:
C23C16/448; H01L21/205; H01L21/31
Foreign References:
| JP2014007378A | 2014-01-16 | |||
| JP2004323894A | 2004-11-18 | |||
| JP2002252219A | 2002-09-06 | |||
| JP2002043282A | 2002-02-08 | |||
| JP2005327995A | 2005-11-24 | |||
| JP2005347446A | 2005-12-15 | |||
| JP2001093895A | 2001-04-06 | |||
| JP2009125703A | 2009-06-11 | |||
| JP2006041481A | 2006-02-09 |
Attorney, Agent or Firm:
MAEI Hiroyuki (JP)
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