Title:
GAS SENSOR ELEMENT AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2011/043258
Kind Code:
A1
Abstract:
Disclosed are a gas sensor element that is capable of reducing deformations in sensitive parts that are caused by stress and a production method therefor. The surface (3A) of a support body (3), which is equipped with a cavity (7) provided with an opening (5), is provided with a base insulating layer (9) that houses a heater wiring pattern (19) and is provided with a fixed section (15) that is fixed to the surface (3A) of the support body (3) and a non-fixed section (17) that is positioned above the opening (5). An electrode wiring pattern (27) and a sensitive membrane (31) are formed on the center part (21) of the non-fixed section (17) of the base insulating layer (9). The non-fixed section (17) forms the center part (21) and a plurality of connecting parts (23) that connect the center part (21) and the fixed section (15). The four connecting parts (23) are formed from base parts (33) and extending parts (35). The base parts (33) of the connecting parts (23) are formed so as to extend along the edge (5A) of the opening (5). The extending parts (35) are formed so as to extend from the base parts (33) towards the center part (21) and connect to the center part (21). The connecting parts (23) are formed in a manner such that the maximum width dimension (W1) of the base part (33) is larger than the maximum width dimension (W2) of the extending part (35).
Inventors:
IMAMURA TETSUJI
KUWAHARA DAISUKE
KUWAHARA DAISUKE
Application Number:
PCT/JP2010/067232
Publication Date:
April 14, 2011
Filing Date:
October 01, 2010
Export Citation:
Assignee:
HOKURIKU ELECT IND (JP)
IMAMURA TETSUJI
KUWAHARA DAISUKE
IMAMURA TETSUJI
KUWAHARA DAISUKE
International Classes:
G01N27/12
Foreign References:
| JP2009020053A | 2009-01-29 | |||
| JP2009058389A | 2009-03-19 | |||
| JP2007132814A | 2007-05-31 | |||
| JP2000258376A | 2000-09-22 | |||
| JPH11160267A | 1999-06-18 | |||
| JPH08264844A | 1996-10-11 | |||
| JPH0688802A | 1994-03-29 | |||
| JPH06258268A | 1994-09-16 | |||
| JP2007132814A | 2007-05-31 | |||
| JP2009058389A | 2009-03-19 |
Other References:
See also references of EP 2487485A4
Attorney, Agent or Firm:
NISHIURA Tsuguharu (JP)
Tsugiharu Nishiura (JP)
Tsugiharu Nishiura (JP)
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