GATE VALVE

WIPO Patent Application WO/2016/204203

A1

Provided is a gate valve that enables a substrate to be suitably removed from a valve body when opening the gate valve.　The gate valve (30A) is a valve that is provided on the entrance and exit openings for a flexible belt-like substrate (2) in a chamber to which the substrate (2) is conveyed and opens and closes the entrance and exit openings. The gate valve (30A) is equipped with a valve seat (31A) provided on one surface side of the substrate (2) and a valve body (32A) provided on the other surface side of the substrate (2). The valve body (32A) is a flexible member. By being seated on the valve seat (31A), the valve body (32A) closes the gate valve (30A) in a state sandwiching the substrate (2) with the valve body (32A) and the valve seat (31A). When the valve body (32A) separates from the valve seat (31A) to open the gate valve (30A), the site on the valve body (32A) that comes into contact with the other surface of the substrate (2) in the seated state also moves in a direction differing from the separation direction of the valve body (32A).

TAKAHASHI NOBUAKI (JP)
AKAGI KIYOSHI (JP)
SHIMIZU GO (JP)
SATO YOSHIKATSU (JP)

PCT/JP2016/067859

December 22, 2016

June 15, 2016

Click for automatic bibliography generation  

KONICA MINOLTA INC (JP)
ULVAC INC (JP)

F16K51/02; C23C14/56; F16K1/34

JP2003119563A	2003-04-23
JP2004314042A	2004-11-11
JP2011127183A	2011-06-30

ISONO INTERNATIONAL PATENT OFFICE, P. C. (JP)
Patent business corporation Isono international patent trademark office (JP)

View/Download PDF      PDF Help

Previous Patent: PRODUCTION METHOD FOR ORGANIC ELECTROLUMINESCENT ELEMENTS

Next Patent: PATTERN FILM FORMING DEVICE