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Patent Searching and Data


Title:
GEL GASKET FILM AND PACKAGING BOX COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2023/191230
Kind Code:
A1
Abstract:
The present invention relates to a gel gasket film, and a packaging box comprising same, and more specifically relates to a gel gasket film in which the surface area of an embossed dot release film is small, making peeling easy, and wherein when the gel gasket is attached to a static chuck or focus ring, and then the release film is removed, there is minimal evidence of embossing, and a packaging box comprising same.

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Inventors:
CHOI HYUN SEOK (KR)
PARK JEONG HYUN (KR)
HAN SANG HYO (KR)
Application Number:
PCT/KR2022/018162
Publication Date:
October 05, 2023
Filing Date:
November 17, 2022
Export Citation:
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Assignee:
SMT CORP (KR)
International Classes:
B32B3/30; B32B7/06; B32B37/26; B32B43/00; C09J5/00; C09J7/40
Foreign References:
JP2013053295A2013-03-21
CN210560226U2020-05-19
KR20180017585A2018-02-21
JP6739478B22020-08-12
CN111607364A2020-09-01
Attorney, Agent or Firm:
KANGIN PATENT LAW FIRM (KR)
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