Title:
GLASS FORMING MOLD, GLASS FORMING DEVICE, GLASS FORMING METHOD, AND METHOD FOR MANUFACTURING PHOTOMASK SUBSTRATE
Document Type and Number:
WIPO Patent Application WO/2012/039331
Kind Code:
A1
Abstract:
A glass forming mold is provided with: a mold body (10) used to form glass by heating and pressurizing the glass; and a support member (15) disposed so that the support member (15) can come into contact with the movable member (11) of the mold body and capable of being broken in order to relieve stress caused by the difference in linear expansion coefficient between the mold body and the glass.
Inventors:
NAKANO FUMIYASU (JP)
Application Number:
PCT/JP2011/070961
Publication Date:
March 29, 2012
Filing Date:
September 14, 2011
Export Citation:
Assignee:
NIKON CORP (JP)
NAKANO FUMIYASU (JP)
NAKANO FUMIYASU (JP)
International Classes:
C03B11/08; C03B20/00
Foreign References:
| JP2006001821A | 2006-01-05 | |||
| JP2002053332A | 2002-02-19 | |||
| JPH08208250A | 1996-08-13 |
Attorney, Agent or Firm:
SHIGA Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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Claims: