Title:
GRAPHENE TRANSFER SYSTEM USING HEAT TREATMENT MODULE AND GRAPHENE TRANSFER METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/063473
Kind Code:
A1
Abstract:
Disclosed are a graphene transfer system capable of improving quality and mass productivity and a graphene transfer method using same. By providing a substrate supply unit capable of supplying a substrate loading unit and a graphene transport unit in a vacuum state or a standby state, the process time can be shortened and product quality can be prevented from degrading by external contamination. In addition, since before a graphene transfer process is performed, the moisture remaining on the substrate loading unit can be removed by using a heat treatment module, and the substrate loading unit can be rapidly cooled by using the heat treatment module heated in the heat treatment process, the process time can be shortened. Therefore, graphene transfer quality can be improved, and the mass productivity according to shortening of the process time can be improved.
Inventors:
LEE SANG KYUNG (KR)
Application Number:
PCT/KR2021/016499
Publication Date:
April 20, 2023
Filing Date:
November 12, 2021
Export Citation:
Assignee:
ALPHA GRAPHENE INC (KR)
International Classes:
C01B32/194; B32B37/00; B32B38/00; B32B38/18; B32B43/00
Foreign References:
| KR101899224B1 | 2018-10-04 | |||
| KR102309244B1 | 2021-10-05 | |||
| KR20140132230A | 2014-11-17 | |||
| KR101303930B1 | 2013-09-05 | |||
| JP2011051801A | 2011-03-17 |
Attorney, Agent or Firm:
E-SANG PATENT & TRADEMARK LAW FIRM (KR)
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