Title:
CRYOGENIC ELECTROSTATIC CHUCK SYSTEM AND METHOD FOR CONTROLLING SAME
Document Type and Number:
WIPO Patent Application WO/2023/063474
Kind Code:
A1
Abstract:
A cryogenic electrostatic chuck system and a method for controlling same according to a preferred embodiment of the present invention is capable of performing a cryogenic process for a substrate, such as a cryogenic etching process and a cryogenic deposition process, even in a cryogenic range, and is capable of implementing a vertical etch profile, which is ideal for feature etching, with a high aspect ratio.
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Inventors:
KWON GI CHUNG (KR)
KWON HEE TAE (KR)
KIM JI HWAN (KR)
KIM WOO JAE (KR)
BANG IN YOUNG (KR)
KWON HEE TAE (KR)
KIM JI HWAN (KR)
KIM WOO JAE (KR)
BANG IN YOUNG (KR)
Application Number:
PCT/KR2021/016610
Publication Date:
April 20, 2023
Filing Date:
November 15, 2021
Export Citation:
Assignee:
UNIV KWANGWOON IND ACAD COLLAB (KR)
International Classes:
H01L21/683; B23Q3/15; H01L21/67; H01L21/687; H02N13/00
Domestic Patent References:
| WO2021055134A1 | 2021-03-25 |
Foreign References:
| JP2009152475A | 2009-07-09 | |||
| JP2021057522A | 2021-04-08 | |||
| JP2018006768A | 2018-01-11 | |||
| KR100346587B1 | 2002-08-03 |
Attorney, Agent or Firm:
WOOIN PATENT & LAW FIRM (KR)
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