Title:
GRAPHITE CARRIER AND MOCVD REACTION APPARATUS HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2020/258676
Kind Code:
A1
Abstract:
Disclosed are a graphite carrier (10) and a MOCVD reaction apparatus (100) having same; the graphite carrier (10) comprises an inner ring region (10a), a middle ring region (10b), and an outer ring region (10c); the graphite carrier (10) is provided with a plurality of grooves (101) used for carrying a 4-inch substrate; the inner ring region (10a) is provided with six inner ring grooves (101a). In the inner ring region (10a) of the present invention, six inner ring grooves (101a) may be placed, achieving the maximum number of slide holders for 4-inch epitaxy production, and effectively improving the ring voltage difference produced by existing graphite carrier technology during the growth of an epitaxial wafer.
Inventors:
CHEN HAO (CN)
TAO GUANQUN (CN)
RAO XIAOSONG (CN)
WANG MING (CN)
LIU MIN (CN)
PU JIAN (CN)
TAO GUANQUN (CN)
RAO XIAOSONG (CN)
WANG MING (CN)
LIU MIN (CN)
PU JIAN (CN)
Application Number:
PCT/CN2019/118638
Publication Date:
December 30, 2020
Filing Date:
November 15, 2019
Export Citation:
Assignee:
FOCUS LIGHTINGS TECH CO LTD (CN)
International Classes:
C30B25/12; C23C16/458
Foreign References:
| CN103205731A | 2013-07-17 | |||
| CN102766854A | 2012-11-07 | |||
| CN202543317U | 2012-11-21 | |||
| CN204874729U | 2015-12-16 | |||
| CN202116645U | 2012-01-18 | |||
| CN205313713U | 2016-06-15 | |||
| CN203999906U | 2014-12-10 |
Attorney, Agent or Firm:
SUZHOU WISPRO INTELLECTUAL PROPERTY AGENCY (CN)
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