Title:
GRATING, METHOD FOR MANUFACTURING GRATING, AND METHOD FOR REPRODUCING GRATING
Document Type and Number:
WIPO Patent Application WO/2016/098237
Kind Code:
A1
Abstract:
A grating for narrowing the band of a laser beam, the wavelength of which is in the vacuum ultraviolet region and which is output from a laser device. Said grating may include: a grating substrate; a first aluminium metal film which is formed on the grating substrate and has a grooved shape on the surface thereof; and a first protective film formed on the first aluminium metal film by the ALD method.
Inventors:
MIYAMOTO HIROTAKA (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2014/083623
Publication Date:
June 23, 2016
Filing Date:
December 18, 2014
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/139; G02B5/18
Foreign References:
| JP2004514794A | 2004-05-20 | |||
| JP2010247417A | 2010-11-04 | |||
| JP2011065113A | 2011-03-31 | |||
| JP2012156245A | 2012-08-16 | |||
| JPH10209533A | 1998-08-07 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
Hosaka Prolongation of life (JP)
Hosaka Prolongation of life (JP)
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