Title:
HARD CARBON FILM, MANUFACTURING METHOD FOR SAME, AND SLIDING MEMBER
Document Type and Number:
WIPO Patent Application WO/2018/207803
Kind Code:
A1
Abstract:
The present invention relates to manufacturing technology for a hard carbon film that can exhibit not only excellent wear resistance but also sufficiently low abrasiveness by smoothing of a sliding surface while suppressing occurrences of cost increases as well as time and effort because of lapping treatments and the like for sliding in oil containing MoDTC. Provided is a hard carbon film that forms a sliding surface of a sliding member, wherein the hard carbon film includes terminal atoms that bond with carbon atoms and has a plurality of protruding shaped parts, part of which protrude from the surface thereof, with the periphery of each of the plurality of protruding shaped parts being terminated by a terminal atom. Also provided is a manufacturing method for the hard carbon film for producing the hard carbon film on a sliding surface of the sliding member using arc vapor deposition having graphite as the vaporization source, wherein a gas containing the terminal atoms that bond with carbon atoms is introduced, and the plurality of protruding shaped parts are grown on the surface of the hard carbon film while terminating the periphery of the plurality of protruding shaped parts by bonding of the terminal atoms with carbon atoms.
Inventors:
OOSHIRO TAKEHIKO (JP)
FUKUTANI YUKAKO (JP)
MIYAKE KOJI (JP)
FUKUTANI YUKAKO (JP)
MIYAKE KOJI (JP)
Application Number:
PCT/JP2018/017862
Publication Date:
November 15, 2018
Filing Date:
May 09, 2018
Export Citation:
Assignee:
NIPPON ITF INC (JP)
International Classes:
C23C14/24; C23C14/06; C23C16/26
Foreign References:
| JP2005307288A | 2005-11-04 | |||
| JP2016196690A | 2016-11-24 |
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