Title:
HARD FILM COATED MEMBER AND METHOD FOR FORMING HARD COATING FILM
Document Type and Number:
WIPO Patent Application WO/2012/057000
Kind Code:
A1
Abstract:
The present invention provides a first hard film coated member wherein: layers A having a composition that satisfies TiaCrbAlcSidYe(BuCvNw) (wherein a, b, c, d, e, u, v and w respectively represent specific atomic ratios) and layers B having a composition that satisfies TifCrgAlh(BxCyNz) (wherein f, g, h, x, y and z respectively represent specific atomic ratios) are alternately laminated on a substrate; and when a lamination structure composed of a pair of the layer A and the layer B is considered as one unit, the thickness of the one unit is 10-50 nm and the film thickness of the hard coating film is 1-5 μm. The present invention also provides a second hard film coated member wherein: the layer A is laminated on the layer B with an intermediate layer interposed therebetween and having a thickness of 0.5 μm or less or without an intermediate layer; and the layer A has a thickness of 0.5-5.0 μm and the layer B has a thickness of 0.05-3.0 μm.
More Like This:
Inventors:
YAMAMOTO KENJI
ITO HIROTAKA
ITO HIROTAKA
Application Number:
PCT/JP2011/074212
Publication Date:
May 03, 2012
Filing Date:
October 20, 2011
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
YAMAMOTO KENJI
ITO HIROTAKA
YAMAMOTO KENJI
ITO HIROTAKA
International Classes:
B23B27/14; C23C14/06; B23B51/00; B23C5/16
Foreign References:
| JP2003071611A | 2003-03-12 |
Attorney, Agent or Firm:
OGURI Shohei et al. (JP)
Shohei Oguri (JP)
Shohei Oguri (JP)
Download PDF:
Claims:
Previous Patent: PORTABLE ELECTRONIC DEVICE
Next Patent: ANOMALY DIAGNOSTIC DEVICE AND INDUSTRIAL MACHINE
Next Patent: ANOMALY DIAGNOSTIC DEVICE AND INDUSTRIAL MACHINE