Title:
HEAT TREATMENT DEVICE AND ATMOSPHERE SUBSTITUTION METHOD FOR HEAT TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/244533
Kind Code:
A1
Abstract:
Evacuation of a reactive gas pipe is continued until the measurement value of a supply check pressure gauge becomes no greater than a first pressure, whereby residual ammonia can be completely discharged from the reactive gas pipe regardless of the full-scale size of a mass flow controller. In addition, after discharging the ammonia from the reactive gas pipe, nitrogen gas supply to the reactive gas pipe is continued until the measurement value of the supply check pressure gauge becomes no less than a second pressure which is higher than the first pressure, whereby the nitrogen gas can be sufficiently supplied and filled into the reactive gas pipe.
Inventors:
OMORI MAO (JP)
FURUKAWA MASASHI (JP)
FURUKAWA MASASHI (JP)
Application Number:
PCT/JP2019/019719
Publication Date:
December 26, 2019
Filing Date:
May 17, 2019
Export Citation:
Assignee:
SCREEN HOLDINGS CO LTD (JP)
International Classes:
H01L21/318; H01L21/26
Foreign References:
| JPH0265226A | 1990-03-05 | |||
| JP2016181641A | 2016-10-13 | |||
| JPS6351931A | 1988-03-05 | |||
| JPH0831369A | 1996-02-02 |
Attorney, Agent or Firm:
YOSHITAKE Hidetoshi et al. (JP)
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