HEATER FOR SEMICONDUCTOR MANUFACTURING AND INSPECTING EQUIPMENT

Title:

HEATER FOR SEMICONDUCTOR MANUFACTURING AND INSPECTING EQUIPMENT

Document Type and Number:

WIPO Patent Application WO/2004/089039

Kind Code:

A1

Abstract:

A ceramic heater for semiconductor manufacturing and inspecting equipment having excellent temperature increase and decrease characteristics, a strong thermal shock in heating and cooling, and excellent uniformity of temperature on a heated surface, comprising heating elements installed on one surface of or inside a substrate, wherein the substrate is formed of a plurality of plate-like segments combined with bar-like segments in circular shape, and heating patterns are provided on the segments independently of each other.

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Inventors:

SUGIMOTO KEIZO (JP)
ITO YASUTAKA (JP)
OZAKI JUN (JP)

Application Number:

PCT/JP2003/004105

Publication Date:

October 14, 2004

Filing Date:

March 31, 2003

Export Citation:

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Assignee:

IBIDEN CO LTD (JP)
SUGIMOTO KEIZO (JP)
ITO YASUTAKA (JP)
OZAKI JUN (JP)

International Classes:

H01L21/00; H05B3/14; (IPC1-7): H05B3/10; H05B3/00; H01L21/60; H01L21/02

Foreign References:

JP2002184557A	2002-06-28
JP2002184558A	2002-06-28

Attorney, Agent or Firm:

Ogawa, Junzo (8-9 Ginza 2-chom, Chuo-ku Tokyo, JP)

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