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Patent Searching and Data


Title:
HEATER AND STAGE
Document Type and Number:
WIPO Patent Application WO/2020/080094
Kind Code:
A1
Abstract:
Provided is a heater having: a folded heater wire; a first insulator provided to the heater wire; a metal sheath provided so as to be in contact with at least part of the first insulator; a first insulative member disposed parallel to at least part of one end of the heater wire, which is led out from a first end of the metal sheath; a second insulative member disposed parallel to at least part of the first insulative member and disposed parallel to at least part of the other end of the heater wire, which is led out from the first end of the metal sheath; a third insulative member disposed parallel to at least part of each of the first insulative member and the second insulative member and provided to bundle together the first insulative member and the second insulative member; and a circular cylindrical member disposed parallel to at least part of each of the metal sheath and the third insulative member.

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Inventors:
HANAMACHI TOSHIHIKO (JP)
TATSUMI ARATA (JP)
SEKIYA KENJI (JP)
AIKAWA NAOYA (JP)
TAKANASHI MASAYA (JP)
Application Number:
PCT/JP2019/038711
Publication Date:
April 23, 2020
Filing Date:
October 01, 2019
Export Citation:
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Assignee:
NHK SPRING CO LTD (JP)
International Classes:
H05B3/48; C23C14/50; C23C16/46; H01L21/3065; H01L21/31; H05B3/02
Foreign References:
JPS57202093A1982-12-10
JPS5483648U1979-06-13
JPS61181091A1986-08-13
JP3040731U1997-08-26
JPS54126146U1979-09-03
JP2009091660A2009-04-30
JP2014222651A2014-11-27
JP2009091660A2009-04-30
Other References:
See also references of EP 3869909A4
Attorney, Agent or Firm:
TAKAHASHI, HAYASHI AND PARTNER PATENT ATTORNEYS, INC. (JP)
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