Title:
HEATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/065765
Kind Code:
A1
Abstract:
A heating device (40) according to the present invention is provided with: a chamber (41) in which a mixture (12a) is fired; an introduction pipe (60A) which is connected to the chamber (41) and introduces N2 into the chamber (41); and a discharge pipe (70A) which is connected to the chamber (41) and discharges a gas from the chamber (41). The discharge pipe (70A) is provided so as to surround the introduction pipe (60A). Consequently, the present invention provides a heating device which is prevented from increase in the power consumption.
Inventors:
FUJIWARA MASAKI
Application Number:
PCT/JP2018/035690
Publication Date:
April 02, 2020
Filing Date:
September 26, 2018
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
B29C35/02; H01L21/324
Foreign References:
| JP2018093148A | 2018-06-14 | |||
| JP2017166721A | 2017-09-21 | |||
| JP2016139556A | 2016-08-04 | |||
| JP2015209557A | 2015-11-24 | |||
| JPH1012517A | 1998-01-16 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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