Title:
HEMISPHERICAL RESONANT MICROMECHANICAL GYROSCOPE AND MANUFACTURING PROCESS THEREOF
Document Type and Number:
WIPO Patent Application WO/2013/185417
Kind Code:
A1
Abstract:
A hemispherical resonant micromechanical gyroscope comprises a resonant layer (1). The resonant layer (1) comprises a hemispherical shell (2) and multiple silicon spherical surface electrodes surrounding the hemispherical shell (2). The hemispherical shell (2) is made of polysilicon, silica, or diamond, and has an inner surface recessed inwards and an outer surface opposite to the inner surface. The apex of the hemispherical shell (2) is the anchor point. The silicon spherical surface electrodes comprise a drive electrode (4), a force balancing electrode (5), a signal detecting electrode (6), and a shielding electrode (7). The shielding electrode (7) separates the drive electrode (4) and the force balancing electrode (5) from the signal detecting electrode (6). The hemispherical shell (2) and the multiple silicon spherical surface electrodes surrounding same form multiple capacitors. The hemispherical resonant micromechanical gyroscope uses a process based on silicon micro-fabrication, has a small size and low manufacturing costs, is capable of undergo mass production, and meanwhile has sensitivity independent of the amplitude thereof and a low drive voltage, can greatly decrease the output noise, and has higher precision than the existing gyroscope products.
Inventors:
GUO SHUWEN (CN)
Application Number:
PCT/CN2012/080825
Publication Date:
December 19, 2013
Filing Date:
August 31, 2012
Export Citation:
Assignee:
SUZHOU WENZHIXIN MICRO SYSTEM TECHNOLOGY CO LTD (CN)
GUO SHUWEN (CN)
GUO SHUWEN (CN)
International Classes:
G01C19/5691
Foreign References:
| EP2390624A2 | 2011-11-30 | |||
| US20090031831A1 | 2009-02-05 | |||
| CN102057250A | 2011-05-11 | |||
| CN101568801A | 2009-10-28 | |||
| CN101802552A | 2010-08-11 | |||
| CN101968359A | 2011-02-09 | |||
| CN101968360A | 2011-02-09 | |||
| US20120144917A1 | 2012-06-14 | |||
| CN1207496A | 1999-02-10 |
Other References:
JI, HAIPING ET AL.: "Researching Development of All-Solid state Micromachined Gyroscope", TRANSDUCER AND MICROSYSTEM TECHNOLOGIES, vol. 25, no. 3, March 2006 (2006-03-01), pages 44 - 47. 50
WU, XIAOSHENG ET AL.: "Study on resonator's characteristics of micro-HRG", CHINESE JOURNAL OF ELECTRON DEVICES, vol. 31, no. 5, October 2008 (2008-10-01), pages 1505 - 1509
LV, ZHIQING: "Research and development of hemispherical resonance gyroscope (HRG)", PROCEEDINGS OF SYMPOSIUM ON DEVELOPMENT AND DIRECTION OF INERTIAL TECHNOLOGY, December 2003 (2003-12-01), pages 103 - 105
WU, XIAOSHENG ET AL.: "Study on resonator's characteristics of micro-HRG", CHINESE JOURNAL OF ELECTRON DEVICES, vol. 31, no. 5, October 2008 (2008-10-01), pages 1505 - 1509
LV, ZHIQING: "Research and development of hemispherical resonance gyroscope (HRG)", PROCEEDINGS OF SYMPOSIUM ON DEVELOPMENT AND DIRECTION OF INERTIAL TECHNOLOGY, December 2003 (2003-12-01), pages 103 - 105
Attorney, Agent or Firm:
SUZHOU CREATOR PATENT & TRADEMARK AGENCY LTD. (CN)
苏州创元专利商标事务所有限公司 (CN)
苏州创元专利商标事务所有限公司 (CN)
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