Title:
HIGH-FREQUENCY IMAGING DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/018774
Kind Code:
A1
Abstract:
Provided is a device 10, 40, 50 that visualizes a distribution of an internal electrical excitation state of a device which is to be measured and to which a high-frequency signal has been input, said device being provided with: a first signal source 12 that inputs a first signal to the device via a signal line 17 and excites a high-frequency physical phenomenon; a pulse laser 14 that outputs repetitive pulsed light; a second signal source 13 that generates a second signal; an imaging unit 19 that irradiates the device with the pulsed light from the pulse laser and receives the pulsed light reflected from the device; an electrooptical modulation unit 16, 51 that applies amplitude modulation to the pulsed light prior to the irradiation of the device or the pulsed light reflected from the device, according to the second signal input from the second signal source; and a frequency control unit 15 that synchronizes the first signal, the output timing of pulsed light of the pulse laser, and the second signal with one another and, when the frequency of the first signal deviates from an integer multiple of the repetition frequency of the pulsed light, sets the frequency of the second signal on the basis of the deviated frequency.
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Inventors:
TAMARU SHINGO (JP)
Application Number:
PCT/JP2023/021169
Publication Date:
January 25, 2024
Filing Date:
June 07, 2023
Export Citation:
Assignee:
AIST (JP)
International Classes:
G01R31/308
Domestic Patent References:
| WO2022064798A1 | 2022-03-31 |
Foreign References:
| JP2021048351A | 2021-03-25 | |||
| JP2016521352A | 2016-07-21 | |||
| JP2020198335A | 2020-12-10 | |||
| US20080164414A1 | 2008-07-10 |
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