Title:
HIGH-FREQUENCY INDUCED EVAPORATION SOURCE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2018/120381
Kind Code:
A1
Abstract:
Provided is a high-frequency induced evaporation source apparatus, comprising an internal crucible (1) for carrying an evaporation material, an induction coil (2) sleeved around the inner crucible (1), a radio frequency generator (3) connected to the induction coil (2), and a radio frequency induction heating component (6) provided inside the internal crucible (1), the induction coil (2) being used to receive an alternating current transmitted by the radio frequency generator (3) to generate an induced magnetic field, and the radio frequency induction heating component (6) comprising an electrically conductive induction core (61) that generates an induction current in the induced magnetic field of the induction coil (2) and generates heat, thereby heating the evaporation material. The evaporation source apparatus can effectively avoid the problem of cracking of an evaporation material due to uneven local heating rates and local overheating.
Inventors:
MU JUNYING (CN)
Application Number:
PCT/CN2017/073879
Publication Date:
July 05, 2018
Filing Date:
February 17, 2017
Export Citation:
Assignee:
WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTD (CN)
International Classes:
C23C14/26
Foreign References:
| CN202786404U | 2013-03-13 | |||
| CN205473956U | 2016-08-17 | |||
| CN1924082A | 2007-03-07 | |||
| CN202881374U | 2013-04-17 | |||
| TW200932918A | 2009-08-01 |
Attorney, Agent or Firm:
COMIPS INTELLECTUAL PROPERTY OFFICE (CN)
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