Title:
HIGH-PRECISION CAPACITIVE DIAPHRAGM VACUUM GAUGE
Document Type and Number:
WIPO Patent Application WO/2022/141774
Kind Code:
A1
Abstract:
A high-precision capacitive diaphragm vacuum gauge, comprising: a housing (1) provided with an accommodating cavity; two sensing diaphragms (2) which are arranged in parallel in the accommodating cavity and which divide the accommodating cavity into a reference vacuum chamber (3) and two chambers (4) to be measured, wherein the two chambers (4) are located at two sides of the reference vacuum chamber (3) respectively, and the two chambers (4) communicate with each other, and are isolated from the reference vacuum chamber (3); a connecting pipe (5) which communicates with one of the chambers (4); and a fixed substrate (6) which is arranged in the reference vacuum chamber (3) and is parallel to the two sensing diaphragms (2), wherein conductive films (7) are arranged on two sides of the fixed substrate (6) respectively, and the conductive films (7) at two sides of the fixed substrate (6) form capacitors with the adjacent sensing diaphragms (2) respectively.
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Inventors:
HOU SHAOYI (CN)
HU LANG (CN)
HU QIANG (CN)
XU PING (CN)
HE BIN (CN)
LI TIANYUN (CN)
GUO YUANJUN (CN)
WEI HONG (CN)
HUANG LILING (CN)
HU LANG (CN)
HU QIANG (CN)
XU PING (CN)
HE BIN (CN)
LI TIANYUN (CN)
GUO YUANJUN (CN)
WEI HONG (CN)
HUANG LILING (CN)
Application Number:
PCT/CN2021/076831
Publication Date:
July 07, 2022
Filing Date:
February 19, 2021
Export Citation:
Assignee:
JI HUA LABORATORY (CN)
International Classes:
G01L21/00
Domestic Patent References:
| WO2020011559A1 | 2020-01-16 |
Foreign References:
| CN107843385A | 2018-03-27 | |||
| CN107356367A | 2017-11-17 | |||
| CN109813491A | 2019-05-28 | |||
| CN207248416U | 2018-04-17 | |||
| CN209470807U | 2019-10-08 | |||
| JP2002267560A | 2002-09-18 |
Attorney, Agent or Firm:
BEIJING MIZAR STAR INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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