Title:
HOME POSITION DETECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/237430
Kind Code:
A1
Abstract:
The present invention relates to a home position detection device, comprising a measuring head, a driving mechanism and a detection cavity. A first optical viewing hole is provided on the detection cavity, and a second optical viewing hole is provided on the measuring head. An opening for the measuring head to pass through is provided on the detection cavity. A shielding door is further provided on the detection cavity, and the driving mechanism is connected to the shielding door for driving the shielding door to move relative to the detection cavity, so as to open or cover the opening for opening or closing the detection cavity. The home position detection device of the present invention is installed in an ultravacuum detection system, which provides an inspector with a detection platform for aligning a sample with a probe and detecting various electrical properties of the sample by means of an optical viewing method, without taking out the sample from an ultrahigh vacuum detection environment, thereby greatly reducing operation steps for the inspector and improving detection efficiency. Furthermore, it is ensured that the sample is always in a vacuum environment during the detection process, so as to protect the surface properties of the sample.
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Inventors:
XUE QIKUN (CN)
HU XIAOPENG (CN)
DENG CHENG (CN)
CHEN XI (CN)
HU XIAOPENG (CN)
DENG CHENG (CN)
CHEN XI (CN)
Application Number:
PCT/CN2018/092909
Publication Date:
December 19, 2019
Filing Date:
June 26, 2018
Export Citation:
Assignee:
UNIV TSINGHUA (CN)
International Classes:
G01R31/00
Foreign References:
| CN208367116U | 2019-01-11 | |||
| CN104749470A | 2015-07-01 | |||
| CN103792443A | 2014-05-14 | |||
| EP2073250A2 | 2009-06-24 |
Other References:
See also references of EP 3809147A4
Attorney, Agent or Firm:
ACIP LAW OFFICES (CN)
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