HYBRID ACOUSTIC WAVE RESONATOR AND PREPARATION METHOD THEREFOR

WIPO Patent Application WO/2020/087566

A1

A hybrid acoustic wave resonator. An interdigital electrode (3) is provided on a first area of the surface of a piezoelectric film (2) so that a surface acoustic wave resonator is comprised in the hybrid acoustic wave resonator; at least two trenches (4) are provided in a second area of the surface of the piezoelectric film (2); a bulk acoustic wave propagation portion (5) is formed between adjacent trenches (4); a bulk acoustic wave electrode (6) is provided on a side surface of the bulk acoustic wave propagation portion (5), and an air gap (7) is provided on a side surface of the bulk acoustic wave electrode (6) opposite to the bulk acoustic wave propagation portion (5), thereby forming a bulk acoustic wave resonator, so that the surface acoustic wave resonator and the bulk acoustic wave resonator are simultaneously provided in the hybrid acoustic wave resonator, and the integration of different kinds of resonators is implemented; at the same time, an acoustic wave transmitted in the bulk acoustic wave propagation portion (5) and an acoustic wave transmitted in an interdigital transducer are both transmitted along a horizontal direction, which ensures that the hybrid acoustic wave resonator has good performance. The present invention further relates to a preparation method for the hybrid acoustic wave resonator, and the prepared hybrid acoustic wave resonator also has the beneficial effects.

LI PING (CN)
HU NIANCHU (CN)
JIA BIN (CN)

PCT/CN2018/115041

May 07, 2020

November 12, 2018

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EPIC MEMS XIAMEN CO LTD (CN)

H03H9/17

CN108173531A	2018-06-15
US20130321100A1	2013-12-05
CN107422031A	2017-12-01

UNITALEN ATTORNEYS AT LAW (CN)

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