Title:
ILLUMINATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/019242
Kind Code:
A3
Abstract:
This illumination device comprises: a plurality of light sources which generate illuminating light; a light detection unit which is positioned between the illuminating optical system and the area to be illuminated, and which detects the illumination/intensity of the overall illuminating light provided by the plurality of light sources; and an illumination control unit which performs light emitting control on each of the plurality of light sources. The illumination control unit generates, from the plurality of light sources, measurement illumination light in which the illumination/intensity fluctuates according to the different frequency corresponding to each of the plurality of light sources, and the light detection unit obtains, on the basis of the difference frequencies, the illumination/intensity of the illuminating light which does not include the fluctuation components of each light source, from the overall measuring illuminating light obtained by superimposing the measurement illuminating light from each of the light sources.
Inventors:
FUJIMORI AKIYOSHI (JP)
HONDA TOMOHIKO (JP)
HONDA TOMOHIKO (JP)
Application Number:
PCT/IB2014/063537
Publication Date:
April 23, 2015
Filing Date:
July 30, 2014
Export Citation:
Assignee:
ORC MFG CO LTD (JP)
International Classes:
H01L21/027; G01J1/42; G03F7/20; H05B37/02
Foreign References:
| JP2010034293A | 2010-02-12 | |||
| JP2012145498A | 2012-08-02 | |||
| JP2010518595A | 2010-05-27 |
Attorney, Agent or Firm:
MATSUURA, Takashi (12-22 Tsukiji 1-chome, Chuo-k, Tokyo 45, JP)
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