Title:
IMAGE FORMATION METHOD AND IMAGE FORMATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/061516
Kind Code:
A1
Abstract:
Provided are an image formation method and a charged particle beam device which can accurately measure a plurality of objects to be measured and contained in an image by executing a small number of scans.
For this, a scan line is set in a direction other than the edge direction of a plurality of objects to be measured and contained in the image view field and the charged particle beam is scanned according to the setting.
Provided also are a method and a device for setting a scan line direction in an appropriate direction not affected by the pattern deformation or the like.
For this, a direction of disconnection between two patterns to be connected is obtained according to the deformation of the two patterns and a scan line is set in the direction determined according to the one or more directions of disconnection.
Inventors:
NISHIHARA MAKOTO (JP)
YANG KYOUNGMO (JP)
OYABU YOSHIHIRO (JP)
YANG KYOUNGMO (JP)
OYABU YOSHIHIRO (JP)
Application Number:
PCT/JP2009/005374
Publication Date:
June 03, 2010
Filing Date:
October 15, 2009
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
NISHIHARA MAKOTO (JP)
YANG KYOUNGMO (JP)
OYABU YOSHIHIRO (JP)
NISHIHARA MAKOTO (JP)
YANG KYOUNGMO (JP)
OYABU YOSHIHIRO (JP)
International Classes:
H01J37/22; G01B15/00; H01J37/147
Domestic Patent References:
| WO2000028380A1 | 2000-05-18 |
Foreign References:
| JP2007192594A | 2007-08-02 | |||
| JPH09265931A | 1997-10-07 | |||
| JP2007311053A | 2007-11-29 | |||
| JP2004271270A | 2004-09-30 |
Attorney, Agent or Firm:
INOUE, MANABU (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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