Title:
IMAGE GENERATING METHOD, IMAGE GENERATING DEVICE, IMAGE GENERATING PROGRAM, AND STORAGE MEDIUM
Document Type and Number:
WIPO Patent Application WO/2017/073166
Kind Code:
A1
Abstract:
This image generating device obtains a current direction image indicating the direction of current flowing in a semiconductor device, and is provided with: a signal application unit that applies a stimulation signal to the semiconductor device; a magnetism detection unit that outputs a detection signal based on magnetism generated by application of the stimulation signal; and an image generating unit configured to generate, on the basis of the phase difference between the detection signal and a reference signal generated on the basis of the stimulation signal, phase image data including a phase component indicating the phase difference, and to generate, on the basis of the phase image data, a current direction image indicating the direction of current.
Inventors:
OTAKA AKIHIRO (JP)
NAKAMURA TOMONORI (JP)
NAKAMURA TOMONORI (JP)
Application Number:
PCT/JP2016/075983
Publication Date:
May 04, 2017
Filing Date:
September 05, 2016
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G01R19/14; G01N21/21; G01N27/72; G01R31/26
Domestic Patent References:
| WO2005022180A1 | 2005-03-10 | |||
| WO2016129458A1 | 2016-08-18 |
Foreign References:
| JPH11142453A | 1999-05-28 | |||
| JP2005134169A | 2005-05-26 | |||
| JPS4641157B | ||||
| US6141093A | 2000-10-31 | |||
| JPH06213976A | 1994-08-05 |
Other References:
IWANAMI, MIZUKI ET AL.: "Magnetic Near-Field Distribution Measurements over Fine Meander Circuit Patterns by Fiber-Optic Magneto-Optic Probe", 2003 IEEE INTERNATIONAL SYMPOSIUM ON ELECTROMAGNETIC COMPATIBILITY, vol. 1, August 2003 (2003-08-01), pages 347 - 352, XP055379121
ROTH, BRADLEY J. ET AL.: "Using a magnetometer to image a two-dimensional current distribution", JOURNAL OF APPLIED PHYSICS, vol. 65, no. 1, January 1989 (1989-01-01), pages 361 - 372, XP000093117
ROTH, BRADLEY J. ET AL.: "Using a magnetometer to image a two-dimensional current distribution", JOURNAL OF APPLIED PHYSICS, vol. 65, no. 1, January 1989 (1989-01-01), pages 361 - 372, XP000093117
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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