Title:
IMAGE-MATCHING DETERMINATION METHOD, IMAGE-MATCHING DETERMINATION DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM ON WHICH PROGRAM FOR EXECUTING IMAGE-MATCHING DETERMINATION METHOD ON COMPUTER IS RECORDED
Document Type and Number:
WIPO Patent Application WO/2020/158261
Kind Code:
A1
Abstract:
An image-matching determination method wherein: an object having a pattern created on the basis of a CAD pattern in design data is transferred to a prescribed imaging position by a transfer stage; a real image of the pattern of the object at the prescribed imaging position is generated; a movement vector of the transfer stage is calculated; a matching process is carried out on the CAD pattern and the pattern on the real image; an amount of deviation between the CAD pattern and the pattern on the real image is calculated; shape data of the CAD pattern, the amount of deviation, and the movement vector of the transfer stage are input to a model constructed by machine learning; a calculation is performed in accordance with an algorithm defined by the model; and an index value indicating whether the matching process has succeeded or has failed is output from the model.
Inventors:
NAKAZAWA SHINICHI (JP)
HAGA TSUGIHIKO (JP)
HAGA TSUGIHIKO (JP)
Application Number:
PCT/JP2019/050631
Publication Date:
August 06, 2020
Filing Date:
December 24, 2019
Export Citation:
Assignee:
TASMIT INC (JP)
International Classes:
G06T7/00; H01L21/66
Foreign References:
| JP2016173615A | 2016-09-29 | |||
| JPH0786349A | 1995-03-31 |
Attorney, Agent or Firm:
HIROSAWA, Tetsuya et al. (JP)
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