Title:
IMAGE PICKUP UNIT AND MICROSCOPE APPARATUS USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/052338
Kind Code:
A1
Abstract:
Provided is an image pickup unit that allows smooth exchanging of prisms, and enables focused image information to be obtained. This image pickup unit (1) comprises a prism unit (5) that holds a prism (9) therein; a casing (3) that has formed therein a prism insertion section (23) to which the prism unit (5) can be installed detachably, and has measurement light enter therein from outside; two or more image pickup elements (7a, 7b) built-into the casing (3), and installed at positions where measurement light separated by the prism (9) can be received; and a moving mechanism (29) that enables at least one pickup element (7a) among the two or more image pickup elements (7a, 7b) to be moved along an optical axis of the separated measurement light.
Inventors:
NONAKA HIROTAKA (JP)
OHGITA JUNPEI (JP)
OHGITA JUNPEI (JP)
Application Number:
PCT/JP2010/067089
Publication Date:
May 05, 2011
Filing Date:
September 30, 2010
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
NONAKA HIROTAKA (JP)
OHGITA JUNPEI (JP)
NONAKA HIROTAKA (JP)
OHGITA JUNPEI (JP)
International Classes:
H04N5/225; G02B21/36
Foreign References:
| JP2004318181A | 2004-11-11 | |||
| JPH066646A | 1994-01-14 | |||
| JPH06109977A | 1994-04-22 | |||
| JP2001091835A | 2001-04-06 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
Download PDF:
Previous Patent: SHIP RESISTANCE-REDUCTION DEVICE
Next Patent: PATTERN DIMENSION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM MICROSCOPE USED IN SAME
Next Patent: PATTERN DIMENSION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM MICROSCOPE USED IN SAME