Title:
IMAGE PROCESSING METHOD AND IMAGE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/090206
Kind Code:
A1
Abstract:
This image processing method for processing an image, comprises: a step (A) for acquiring a plurality of frame images that each are obtained in a single scanning of an imaging object with a charged particle beam; a step (B) for determining, from the plurality of frame images, luminance probability distributions for respective pixels; and a step (C) for generating an image which is of the imaging object and which corresponds to an image obtained by averaging another plurality of frame images generated on the basis of the luminance probability distributions of the respective pixels.
Inventors:
KOBAYASHI SHINJI (JP)
Application Number:
PCT/JP2019/033372
Publication Date:
May 07, 2020
Filing Date:
August 26, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01J37/22; G06T7/00; H01L21/66
Foreign References:
| JP2013051089A | 2013-03-14 | |||
| JP2010062106A | 2010-03-18 | |||
| JP2016170896A | 2016-09-23 | |||
| JP2017050222A | 2017-03-09 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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