Title:
IMAGING DEVICE AND METHOD FOR MANUFACTURING IMAGING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/235281
Kind Code:
A1
Abstract:
An imaging device according to an embodiment of the present invention comprises: a photoelectric conversion unit that converts light into an electric charge; an electric charge storage region that stores the electric charge; a first transistor that is electrically connected to the electric charge storage region and includes a first gate electrode and a first side wall which is positioned on a side wall of the first gate electrode; a first plug that is connected to the first gate electrode; a first silicide layer that contacts an upper surface of the first plug; and a first insulating layer that contacts the first side wall and the first silicide layer.
Inventors:
SAEKI KOSAKU
Application Number:
PCT/JP2020/017120
Publication Date:
November 26, 2020
Filing Date:
April 21, 2020
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
H01L21/28; H01L21/306; H01L21/316; H01L21/318; H01L27/146
Domestic Patent References:
| WO2013190759A1 | 2013-12-27 | |||
| WO2014002390A1 | 2014-01-03 |
Foreign References:
| JP2015233128A | 2015-12-24 | |||
| JPH05166809A | 1993-07-02 |
Attorney, Agent or Firm:
KAMATA Kenji et al. (JP)
Download PDF: