IMAGING SYSTEM AND METHOD FOR SPECIMEN DETECTION

WIPO Patent Application WO/2020/019409

A1

An imaging system (100) is provided, and includes: a micro computed tomography (micro-CT) subsystem, a specimen processing subsystem, a scanning electron microscopy (SEM) (107) and a processor (109). The micro-CT subsystem includes an X-ray source (101) and an X-ray detector (102), and is configured to acquire a three-dimensional image of a specimen (104). The specimen processing subsystem includes a focused ion beam subsystem (105) and a mechanical cutting device (106). The focused ion beam subsystem (105) is configured to process the specimen (104) in a first processing manner, and the mechanical cutting device (106) is configured to process the specimen (104) in a second processing manner to obtain a target section of a target area. The SEM (107) is located above the specimen (104) and is configured to acquire a two-dimensional image of the target section. The processor is configured to perform three-dimensional reconstruction on the two-dimensional images to obtain a three-dimensional imaging of the specimen (104).

JP2023054438	X-RAY INSPECTION DEVICE USING INDUSTRIAL ROBOT ARM AND X-RAY INSPECTION METHOD
WO/2020/232558	METHOD AND APPARATUS FOR FLAT PANEL COMPUTED TOMOGRAPHY
JP2023040486	CT DEVICE

HE WEI (CN)
LI SHUAI (CN)

PCT/CN2018/103852

January 30, 2020

September 03, 2018

Click for automatic bibliography generation  

FOCUS EBEAM TECH BEIJING CO LTD (CN)

G01N23/046; G01N23/2251

CN207610995U	2018-07-13
CN104903711A	2015-09-09
CN104833659A	2015-08-12
CN105683736A	2016-06-15
CN108020503A	2018-05-11
US6744572B1	2004-06-01
JP2989559B2	1999-12-13

CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)

View/Download PDF      PDF Help

Previous Patent: METHOD AND APPARATUS FOR PROCESSING BLOOD VESSEL IMAGE, STORAGE MEDIUM, AND IMAGING DEVICE

Next Patent: ASSEMBLY STRUCTURE