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Title:
IMPLANTABLE SENSOR/ACTUATOR HAVING MOVABLE STRUCTURE AND PACKAGING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2020/143355
Kind Code:
A1
Abstract:
An implantable sensor or actuator having a movable structure and a packaging method therefor. The implantable sensor or actuator having a movable structure comprises a sensor or actuator body and a packaging structure provided on the outer surface of the sensor or actuator body; the packaging structure comprises a first protection layer (40) covering the outer surface of the sensor or actuator body and a second protection layer (50) located on the outer surface of the first protection layer (40); one of the first protection layer (40) and the second protection layer (50) is a dense nano-scale coating, and the other one of the first protection layer (40) and the second protection layer (50) is a micro-scale coating. The packaging method comprises: sequentially forming the first protection layer (40) and the second protection layer (50) on the outer surface of the sensor or actuator body. The synergistic effect of the nano-scale coating and the micro-scale coating achieves double protection against the influence from gas or liquid, and simultaneously reduces the packaging size.

Inventors:
YANG XING (CN)
YAO JIALIN (CN)
WANG BO (CN)
Application Number:
PCT/CN2019/122088
Publication Date:
July 16, 2020
Filing Date:
November 29, 2019
Export Citation:
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Assignee:
UNIV TSINGHUA (CN)
International Classes:
A61F2/00; B81B7/00; B81C1/00
Foreign References:
CN209411765U2019-09-20
CN109626319A2019-04-16
US20100228348A12010-09-09
US20100228348A12010-09-09
US20070173952A12007-07-26
CN102764599A2012-11-07
CN106310376A2017-01-11
CN102676990A2012-09-19
CN202335944U2012-07-18
CN104491923A2015-04-08
CN103378247A2013-10-30
US20060216494A12006-09-28
US20030185964A12003-10-02
Attorney, Agent or Firm:
TSINGYIHUA INTELLECTUAL PROPERTY LLC (CN)
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