Title:
IMPRINTING LAMINATED BODY, METHOD FOR MANUFACTURING IMPRINTING LAMINATED BODY, METHOD FOR FORMING PATTERN, AND KIT
Document Type and Number:
WIPO Patent Application WO/2020/059603
Kind Code:
A1
Abstract:
The present invention provides an imprinting laminated body 10 having: an underlayer film 11 that is formed from an underlayer-film-forming composition, which contains a polymer having an aromatic ring and a polymerizable group; a liquid film 12 that is provided on the surface of the underlayer film 11 and contains a polymerizable compound that is a liquid at 23°C and 1 atm; and an imprinting photosetting composition 13 that is provided on the surface of the liquid film 12. The present invention also provides a method for manufacturing an imprinting laminated body, a method for forming a pattern, and a kit.
Inventors:
SHIMOJU NAOYA (JP)
HAKAMATA AKIHIRO (JP)
GOTO YUICHIRO (JP)
HAKAMATA AKIHIRO (JP)
GOTO YUICHIRO (JP)
Application Number:
PCT/JP2019/035750
Publication Date:
March 26, 2020
Filing Date:
September 11, 2019
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H01L21/027; B29C39/20; B32B27/24; B29L9/00
Domestic Patent References:
| WO2016152600A1 | 2016-09-29 | |||
| WO2017170697A1 | 2017-10-05 | |||
| WO2017170128A1 | 2017-10-05 | |||
| WO2017170631A1 | 2017-10-05 | |||
| WO2014163198A1 | 2014-10-09 | |||
| WO2018051960A1 | 2018-03-22 |
Foreign References:
| JP2017055108A | 2017-03-16 | |||
| US7759407B2 | 2010-07-20 |
Attorney, Agent or Firm:
SIKs & Co. (JP)
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