Title:
LAMINATED BODY FOR IMPRINTING, METHOD FOR MANUFACTURING LAMINATED BODY FOR IMPRINTING, METHOD FOR FORMING PATTERN, AND KIT
Document Type and Number:
WIPO Patent Application WO/2020/059604
Kind Code:
A1
Abstract:
In order to achieve a laminated body for imprinting capable of bringing about excellent adhesion to, for example, a substrate of a cured product formed of a photosetting composition for imprinting, and excellent wettability of the photosetting composition for imprinting, a laminated body for imprinting according to the present invention is configured to have: an underlayer film 11 formed of an underlayer-film-forming composition containing a polymer having a radical polymerizable group and a cation polymerizable group; a liquid film 12 that is provided on a surface of the underlayer film 11 and that contains a radical polymerizable compound that is a liquid at 23°C at 1 atmosphere; and a photosetting composition for imprinting 13 that is provided on a surface of the liquid film 12 and that contains a radical polymerizable compound and a photo radical polymerization initiator.
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Inventors:
SHIMOJU NAOYA (JP)
HAKAMATA AKIHIRO (JP)
GOTO YUICHIRO (JP)
HAKAMATA AKIHIRO (JP)
GOTO YUICHIRO (JP)
Application Number:
PCT/JP2019/035751
Publication Date:
March 26, 2020
Filing Date:
September 11, 2019
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| WO2017170631A1 | 2017-10-05 | |||
| WO2014163198A1 | 2014-10-09 | |||
| WO2017170697A1 | 2017-10-05 | |||
| WO2011013630A1 | 2011-02-03 | |||
| WO2017170684A1 | 2017-10-05 | |||
| WO2018164017A1 | 2018-09-13 |
Foreign References:
| JP2014003123A | 2014-01-09 | |||
| JP2011159924A | 2011-08-18 |
Attorney, Agent or Firm:
SIKs & Co. (JP)
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