IN-LINE GAS IONIZER AND METHOD

WIPO Patent Application WO2001084683

A3

A first stream of pressurized gas is directed at high toward a target area through an ionization chamber. As the high-speed, pressurized gas flows through the ionization chamber, a low-pressure region is used to draw a second stream of gas into the ionization chamber. The second stream of gas is drawn into the ionization chamber from the target area. Re-circulation of gas from the target area supplements the pressurized gas, thereby increasing the efficiency of ionization while reducing the volume of pressurized gas that must be consumed. This helps to prevent recombination while increasing the rate of flow of ionized gas to the target area. A cost-effective, safe, low-level radiation source is used to direct soft X-rays through a filtering window at the gas as it passes through the ionization chamber. Use of the filtering window physically separates the low-level radiation source from the ionization chamber and only allows soft X-rays to pass into the chamber. The filtering window is comprised of thin polymer film mounted on a silicon support grid and surrounded by a support ring, which provides an effective and safe device for filtering and dispersing the soft X-rays. Perfectly balanced amounts of positive and negative ions are produced by this type of X-ray ionization technique. No electric field, ozone, or EMI is generated, and no calibration is required. The output is particle and contaminate free with no cleaning maintenance required.

LERI DENNIS A

PCT/US2001/014084

February 07, 2002

May 01, 2001

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ION SYSTEMS INC (US)

B01J19/12; B01J4/02; H01L21/02; H01T23/00; H05F3/06; (IPC1-7): H05F3/06

GB769055A	1957-02-27
US4438479A	1984-03-20

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