Title:
INDUCTION PLASMA SOURCE INCLUDING CONVEX DOME-SHAPED INDUCTION COIL
Document Type and Number:
WIPO Patent Application WO1998037739
Kind Code:
A3
Abstract:
An induction plasma source for integrated circuit fabrication includes an induction coil which defines a generally convex surface. The convex surface may be in the form of a spherical section less than a hemisphere, a paraboloid, or some other smooth convex surface. The windings of the induction coil may be spaced at different intervals in different sections of the coil and may be in multiple layers in at least a portion of the coil. Varying the shape of the coil and the distribution of the coil windings allows the plasma to be shaped in a desired manner.
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Inventors:
TOBIN JEFFREY A
BENZING JEFFREY C
BROADBENT ELIOT K
ROUGH J KIRKWOOD H
BENZING JEFFREY C
BROADBENT ELIOT K
ROUGH J KIRKWOOD H
Application Number:
PCT/US1998/002261
Publication Date:
October 22, 1998
Filing Date:
February 20, 1998
Export Citation:
Assignee:
NOVELLUS SYSTEMS INC (US)
International Classes:
H01J37/32; (IPC1-7): H05H/
Foreign References:
| GB2231197A | 1990-11-07 |
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