Title:
INFORMATION PROCESSING DEVICE, DISPLAY INPUT DEVICE, AND PROGRAM
Document Type and Number:
WIPO Patent Application WO/2023/238652
Kind Code:
A1
Abstract:
This information processing device configures polishing content of a probe that contacts a subject. The information processing device comprises: an area setting unit which sets a polishing area in a polishing member that polishes a probe; a pattern setting unit which sets an operation pattern upon polishing the probe; and a simulation unit which calculates relative trajectories of the polishing member and the probe on the basis of the set operation pattern. Accordingly, the information processing device can communize the configuration of the polishing content of a probe and achieve a reduction in man-hours.
Inventors:
ISHII KAZUNARI (JP)
Application Number:
PCT/JP2023/019133
Publication Date:
December 14, 2023
Filing Date:
May 23, 2023
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
G01R1/06; G01R31/26; G01R31/28; H01L21/66
Foreign References:
| JPH10209232A | 1998-08-07 | |||
| JP2004170265A | 2004-06-17 | |||
| JP2005177892A | 2005-07-07 | |||
| JP2008051547A | 2008-03-06 | |||
| JP2009543052A | 2009-12-03 | |||
| JP2010048789A | 2010-03-04 | |||
| JP2019130444A | 2019-08-08 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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