Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
INFORMATION PROCESSING DEVICE, FABRICATION DEVICE, ESTIMATION METHOD, PROGRAM, AND FABRICATION METHOD
Document Type and Number:
WIPO Patent Application WO/2016/132759
Kind Code:
A1
Abstract:
A physical quantity is efficiently estimated during repetitive execution of an etching process simulation with parameter modifications. An information processing device is provided with a basic shape storage unit and a physical quantity estimation unit. In the information processing device, the basic shape storage unit stores, as a basic shape, the shape of a sample etched in a chamber. In the information processing device, on the basis of the basic shape and a sample processing condition related to a physical quantity in the chamber, the physical quantity estimation unit estimates the physical quantity.

More Like This:
JPH0541390MANUFACTURE OF THIN FILM TRANSISTOR
WO/2006/135043PROTECTIVE FILM STRUCTURE OF METAL MEMBER, METAL COMPONENT EMPLOYING PROTECTIVE FILM STRUCTURE, AND EQUIPMENT FOR PRODUCING SEMICONDUCTOR OR FLAT-PLATE DISPLAY EMPLOYING PROTECTIVE FILM STRUCTURE
Inventors:
KUBOI NOBUYUKI (JP)
KINOSITA TAKASHI (JP)
Application Number:
PCT/JP2016/050430
Publication Date:
August 25, 2016
Filing Date:
January 08, 2016
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
SONY CORP (JP)
International Classes:
H01L21/3065; H05H1/46
Domestic Patent References:
WO2011115023A12011-09-22
Foreign References:
JP2012186394A2012-09-27
JP2006324682A2006-11-30
JP2000150607A2000-05-30
Attorney, Agent or Firm:
MARUSHIMA, TOSHIKAZU (JP)
Toshikazu Marushima (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: TRAFFIC MANAGEMENT SERVER, VEHICLE-MOUNTED TERMINAL DEVICE, AND TRAFFIC MANAGEMENT SYSTEM

Next Patent: ADDITIVE FOR BIOETHANOL FERMENTATION PROCESS AND METHOD FOR PRODUCING BIOETHANOL