Title:
INFORMATION PROCESSING DEVICE, INFERENCE DEVICE, MACHINE LEARNING DEVICE, INFORMATION PROCESSING METHOD, INFERENCE METHOD, AND MACHINE LEARNING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/058289
Kind Code:
A1
Abstract:
The present invention relates to an information processing device, an inference device, a machine learning device, an information processing method, an inference method, and a machine learning method. This information processing device (5) comprises: an information acquisition unit (500) that acquires alarm occurrence information including at least alarm type information showing the type of alarm that occurred in a substrate processing device (2) that is constituted by a plurality of modules and performs polishing processing of the substrate, and substrate placement information showing the placement state of the substrate in each of the plurality of modules when an alarm occurred, and a support processing unit (501) that generates support information corresponding to an alarm by inputting the alarm occurrence information acquired by the information acquisition unit (500) in response to the occurrence of an alarm in a learning model that uses machine learning to learn the correlation between the alarm occurrence information and the support information for dealing with the alarm occurrence.
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Inventors:
NAKAGOMI RYO (JP)
MEGURO TAKAYOSHI (JP)
MEGURO TAKAYOSHI (JP)
Application Number:
PCT/JP2022/027507
Publication Date:
April 13, 2023
Filing Date:
July 13, 2022
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
H01L21/304; G05B23/02; G06N20/00; H01L21/02
Foreign References:
| JP2007301690A | 2007-11-22 | |||
| JP2005182635A | 2005-07-07 | |||
| JP2010232405A | 2010-10-14 | |||
| JP2018097494A | 2018-06-21 | |||
| JP2005259792A | 2005-09-22 |
Attorney, Agent or Firm:
HIROSAWA, Tetsuya et al. (JP)
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