Title:
INFORMATION PROCESSING DEVICE, MACHINE LEARNING DEVICE, INFORMATION PROCESSING METHOD, AND MACHINE LEARNING METHOD
Document Type and Number:
WIPO Patent Application WO/2024/024391
Kind Code:
A1
Abstract:
The present invention relates to an information processing device, a machine learning device, an information processing method, and a machine learning method. An information processing device (5) comprises: a fluid supply information acquisition unit (500) for, in a substrate process performed by a substrate processing device provided with a processing member which is to be brought into contact with a substrate and which performs a prescribed substrate process thereon and a processing fluid supply unit for supplying a processing fluid to the substrate or to the processing member, acquiring fluid supply information that includes processing fluid state information indicating the supply state of the processing fluid to be supplied from the processing fluid supply unit; and a fluid distribution information generation unit (501) for generating, on the basis of the fluid supply information acquired by the fluid supply information acquisition unit (500), fluid distribution information indicating the distribution state when the processing fluid supplied from the processing fluid supply unit is distributed while passing through a position of contact between the substrate and the processing member.
Inventors:
WAKIYAMA TAKESHI (JP)
MURATA SEIJI (JP)
MURATA SEIJI (JP)
Application Number:
PCT/JP2023/024389
Publication Date:
February 01, 2024
Filing Date:
June 30, 2023
Export Citation:
Assignee:
EBARA CORP (JP)
International Classes:
H01L21/304; G06N20/00
Domestic Patent References:
| WO2022138272A1 | 2022-06-30 |
Foreign References:
| JP2020120004A | 2020-08-06 | |||
| JP2020053550A | 2020-04-02 | |||
| JP2012074574A | 2012-04-12 | |||
| CN109299485A | 2019-02-01 |
Attorney, Agent or Firm:
HIROSAWA, Tetsuya et al. (JP)
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