Title:
INFRARED SENSOR AND INFRARED SENSOR DEVICE EQUIPPED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2020/195466
Kind Code:
A1
Abstract:
The present invention can suppress variations in the temperatures of a cold contact for each thermal infrared detection unit. According to the present invention, a film structure 3 is supported by a substrate (1). The film structure (3) has a plurality of thermal infrared detection units (4) arranged in an array shape. Each of the plurality of thermal infrared detection units (4) includes a thermo pile (6) that has a plurality of hot contacts (T1) and a plurality of cold contacts (T2). The infrared sensor (100) is further provided with a plurality of heater units (8) and temperature measuring units (9). The plurality of heater units (8) are provided on a first main surface (11) of the substrate (1). The temperature measuring units (9) are provided on the first main surface (11) of the substrate (1) and detect the temperature of the substrate (1). In a plan view from the thickness direction (D1) of the substrate (1), the plurality of heater units (8) respectively face other heater units (8) among the plurality of heater units (8) with a region (10) therebetween, which includes the plurality of thermal infrared detection units (4).
Inventors:
KIDA SHOYA
SHIMAMOTO NOBUAKI
MINAMI NAYUTA
HATTORI ISAO
KOBAYASHI NAOKI
YAMANAKA HIROSHI
SHIMAMOTO NOBUAKI
MINAMI NAYUTA
HATTORI ISAO
KOBAYASHI NAOKI
YAMANAKA HIROSHI
Application Number:
PCT/JP2020/007564
Publication Date:
October 01, 2020
Filing Date:
February 26, 2020
Export Citation:
Assignee:
PANASONIC IP MAN CO LTD (JP)
International Classes:
G01J1/02; G01J5/02; G01J5/16; H01L27/144
Domestic Patent References:
| WO2018042850A1 | 2018-03-08 |
Foreign References:
| JP2001264158A | 2001-09-26 | |||
| JP2003152170A | 2003-05-23 | |||
| JPH0953980A | 1997-02-25 | |||
| JP2015052517A | 2015-03-19 | |||
| JP2020056674A | 2020-04-09 |
Attorney, Agent or Firm:
HOKUTO PATENT ATTORNEYS OFFICE (JP)
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